300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
| Autor: | Robinson, John C., Sendelbach, Matthew J., Moussa, A., Bogdanowicz, J., Groven, B., Morin, P., Beggiato, M., Saib, M., Santoro, G., Abramovitz, Y., Houtchens, K., Ben Nissim, S., Meir, N., Hung, J., Urbanowicz, A., Koret, R., Turovets, I., Lorusso, G. F., Charley, A.-L. |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961X-124961X-7, 1124657p |
| Databáze: | Supplemental Index |
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