Deep learning-based automatic defect classification for semiconductor manufacturing
| Autor: | Robinson, John C., Sendelbach, Matthew J., Kim, Eunpa, Shin, Myungchul, Ahn, Hee-Jun, Park, Soyoon, Lee, Dong-ryul, Park, Haesung, Shin, Minjung, Ihm, Dongchul |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961H-124961H-8, 1124658p |
| Databáze: | Supplemental Index |
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