SEMI-PointRend: improved semiconductor wafer defect classification and segmentation as rendering
| Autor: | Robinson, John C., Sendelbach, Matthew J., Hwang, MinJin, Dey, Bappaditya, Dehaerne, Enrique, Halder, Sandip, Shin, Young-han |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p1249608-1249608-7 |
| Databáze: | Supplemental Index |
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