Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters
| Autor: | Guerrero, Douglas, Amblard, Gilles R., Zhang, Yiren, Umeda, Toru, Sakakibara, Hirokazu, Ibrahim, Sheik Ansar Usman, Sakamoto, Atsushi, Singh, Amarnauth, Shick, Robert, Skjonnemand, Karl, Foubert, Philippe, Drent, Waut |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124981Y-124981Y-6, 1124836p |
| Databáze: | Supplemental Index |
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