Thin underlayer materials for metal oxide resist patterning
| Autor: | Guerrero, Douglas, Amblard, Gilles R., Dei, Satoshi, Hayashi, Yuya, Akita, Shumpei, Yamada, Shuhei, Sakai, Kazunori, Kasai, Tatsuya, Nii, Akitaka, Furusawa, Ayaka, Takada, Kazuya, Kaneko, Tetsuro, Seko, Tomoaki, Yoneda, Eiji, Sakai, Tatsuya |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124981M-124981M-6, 1124836p |
| Databáze: | Supplemental Index |
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