EUV-induced activation mechanism of photoacid generators: key factors affecting EUV sensitivity
| Autor: | Guerrero, Douglas, Amblard, Gilles R., Park, Ji Young, Nguyen, Thanh Cuong, Kim, Deakeon, Song, Hyun-Ji, Hong, Suk Koo, Son, Won-Joon, Ahn, Hyoshin, Jang, Inkook, Kim, Dae Sin |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124980T-124980T-8, 1124829p |
| Databáze: | Supplemental Index |
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