Pattern fidelity improvement of DSA hole patterns
| Autor: | Liddle, J. Alexander, Ruiz, Ricardo, Muramatsu, Makoto, Nishi, Takanori, Ito, Kiyohito, Takahashi, Yoshihito, Hatamura, Yasunori, Kitano, Takahiro, Iwaki, Tomohiro |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12497 Issue: 1 p124970J-124970J-10, 12372041p |
| Databáze: | Supplemental Index |
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