Advances and applications in nanoimprint lithography
| Autor: | Liddle, J. Alexander, Ruiz, Ricardo, Maruyama, Naoki, Sato, Kazuhiro, Suzaki, Yoshio, Jimbo, Satoru, Yamashita, Isamu, Yamamoto, Kenji, Yamamoto, Kiyohito, Hiura, Mitsuru, Takabayashi, Yukio |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12497 Issue: 1 p124970D-124970D-12, 12372043p |
| Databáze: | Supplemental Index |
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