Novel approach of patterning technologies enabling monolithic micro-optical components
| Autor: | Liddle, J. Alexander, Ruiz, Ricardo, Wolf, J., Ferstl, M., Voigt, A., Grützner, S., Schleunitz, A., Grützner, G. |
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| Zdroj: | Proceedings of SPIE; May 2023, Vol. 12497 Issue: 1 p124970F-124970F-11, 12372042p |
| Databáze: | Supplemental Index |
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