Automatic generation of representative and diversified pattern samples from a full chip layout
| Autor: | Kim, Ryoung-Han, Lafferty, Neal V., Zhu, Jun, Falch, Brad, Braam, Kyle, Panaite, Petrisor, Su, Ming, Lee, C. Jay |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12495 Issue: 1 p124951B-124951B-8, 1124568p |
| Databáze: | Supplemental Index |
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