Electrical analysis of a stochastically simulated 2 nm node electrical test structure
| Autor: | Kim, Ryoung-Han, Lafferty, Neal V., Melvin, Lawrence S., Demmerle, Wolfgang, Siebert, Joachim, Stopford, Phil, Zavadskiy, Sergey, Hentschke, Renato, Ramkumar, Krishna, Berthiaume, Sylvain, Kandel, Yudhishthir, Hoppe, Wolfgang, Klostermann, Ulrich, Levinson, Zachary, Stock, Hans-Jürgen, Welling, Ulrich |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12495 Issue: 1 p124950W-124950W-11, 12370062p |
| Databáze: | Supplemental Index |
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