Compact modeling of stochastics and application in OPC
| Autor: | Lio, Anna, Burkhardt, Martin, Gillijns, Werner, Lee, Jae-uk, Kim, Ryan Ryoung han, Wei, Chih-I, Zhang, Xima, Latypov, Azat, Fenger, Germain, Sturtevant, John |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12494 Issue: 1 p124940J-124940J-15, 12369076p |
| Databáze: | Supplemental Index |
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