Infrared and terahertz spectrally adaptive filters based on MEMS technologies

Autor: He, Sailing, Vivien, Laurent, Martyniuk, Mariusz, Silva, KKMB Dilusha, Kala, Hemendra, Zawierta, Michal, Wallace, Vincent P., Walus, Konrad, Faraone, Lorenzo, Shadrivov, Ilya V.
Zdroj: Proceedings of SPIE; March 2023, Vol. 12425 Issue: 1 p124250H-124250H-11, 12300762p
Databáze: Supplemental Index