High precision drilling with aspect ratios of 1:40: from laser source to application
| Autor: | Kling, Rainer, Watanabe, Akira, Pfleging, Wilhelm, Lendner, Florian, Giedl-Wagner, Roswitha, Rübling, Steffen, Sailer, Marc, Fehrenbacher, Axel |
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| Zdroj: | Proceedings of SPIE; March 2023, Vol. 12409 Issue: 1 p124090B-124090B-11, 12284922p |
| Databáze: | Supplemental Index |
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