Investigation of plasma etching for interlayer dielectric planarization in high-efficiency deep-ultraviolet nanowire LEDs
| Autor: | von Freymann, Georg, Blasco, Eva, Chanda, Debashis, Melanson, Bryan, Seitz, Matthew, Zhang, Jing |
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| Zdroj: | Proceedings of SPIE; March 2023, Vol. 12433 Issue: 1 p124330H-124330H-8, 1118979p |
| Databáze: | Supplemental Index |
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