Multi-color ellipsometric mapping tool from cheap parts
| Autor: | Busse, Lynda E., Soskind, Yakov, Nugusse, Berhane, Juhász, György, Major, Csaba, Petrik, Péter, Kálvin, Sándor, Horváth, Zoltán György, Fried, Miklós |
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| Zdroj: | Proceedings of SPIE; March 2023, Vol. 12428 Issue: 1 p124280H-124280H-8, 1118529p |
| Databáze: | Supplemental Index |
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