Flexible and compact perspiration-monitoring system with 0.18 μm BCD process and PDMS micro air-flow path

Autor: Yamamoto, Ayumu, Kaga, Yuta, Aso, Tomohiro, Kuroki, Shin-Ichiro, Momose, Hideya, Johguchi, Koh
Zdroj: Japanese Journal of Applied Physics; April 2023, Vol. 62 Issue: Supplement 3 pSC1078-SC1078, 1p
Abstrakt: This paper presents a wearable perspiration-monitoring system that includes an improved humidity capacitive meter, poly-di-methyl siloxane (PDMS) micro-flow path, and micro blower driver integrated on a custom chip fabricated with a 0.18 μm BCD process and mounted on a flexible board. The improved humidity meter is up to 250 times more accurate than the previous design and with low-power operation. The micro blower driver can blow air sufficiently and regulate the flow rate. The micro air-flow path was fabricated with a PDMS material, resulting in miniaturization and flexibility. The effectiveness of our developed perspiration-monitoring system has been verified through an experiment and demonstration.
Databáze: Supplemental Index