| Autor: |
Kashizaki, Tsubasa, Tomita, Motohiro, Katayama, Kazuaki, Hoshina, Takumi, Matsuki, Takeo, Chung, Sylvia Yuk Yee, Watanabe, Takanobu |
| Zdroj: |
Japanese Journal of Applied Physics; May 2022, Vol. 61 Issue: Supplement 3 pSC1017-SC1017, 1p |
| Abstrakt: |
Heat guide (HG) is a layer providing a heat flux to the desired part in a micro thermoelectric generator (µ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) µ-TEG, which is embedded in SiO2acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-µm-thick HG is able to selectively guide the heat flux to the hot side terminal of the µ-TEG, and the µ-TEG performance is improved by increasing the thickness of the HG. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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