Detection and simulation of defects on precision optical surface
| Autor: | Chu, Junhao, Liu, Wenqing, Xu, Hongxing, Yang, Weixiang, Li, Lanqing, Ni, Kaizao, Liu, Shijie, Chen, Jiaxing |
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| Zdroj: | Proceedings of SPIE; April 2023, Vol. 12617 Issue: 1 p126176R-126176R-6, 1135591p |
| Databáze: | Supplemental Index |
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