| Autor: |
Pernu, Tapio, Saarilahti, Jaakko, Kyynarainen, Jukka, Sillanpaa, Teuvo |
| Zdroj: |
Journal of Microelectromechanical Systems; February 2023, Vol. 32 Issue: 1 p74-81, 8p |
| Abstrakt: |
An ultra-high sensitivity surface-micromachined capacitive differential pressure sensor and capacitance bridge readout circuit, with amplitude balancing for differential low-pressure gas measurement applications, was designed, fabricated, and characterized. The sensor membrane has a diameter of 800 $\mu \text{m}$ with a thickness of 1 $\mu \text{m}$ and the chip size is $1.5\times 2\times 0.6$ mm3. The characterized sensor pressure range is 0–2000 Pa, with a full-scale capacitance difference span of 0.95 pF. Typical pressure error within the pressure range of 0–2000 Pa is ±0.5%, and the temperature coefficient is 0.044%/°C, both respectively from the pressure reading. [2022-0017] |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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