Fabrication of graphene nanomechanical resonators using focused ions beam lithography
| Autor: | Cheng, Buwen, Guo, Jin, Qian, Sen, Song, Wei, Xian, Youlong, Lu, Heng, Chen, Fengnan, Zhang, Ce, Zhang, Yubin, Yan, Ying, Moser, Joel |
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| Zdroj: | Proceedings of SPIE; January 2023, Vol. 12556 Issue: 1 p1255603-1255603-6 |
| Databáze: | Supplemental Index |
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