Simulation verification for the cause of overlapped interference fringes in homogeneity measurement of quartz substrate
| Autor: | Han, Sen, Ehret, Gerd, Chen, Benyong, Wu, Xianyu, Han, Sen, Qi, Xianhao, Cheng, Jun, Zhang, Bo, Zeng, Xuefeng, Luo, Xiao |
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| Zdroj: | Proceedings of SPIE; December 2022, Vol. 12319 Issue: 1 p123191D-123191D-9, 1108729p |
| Databáze: | Supplemental Index |
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