OPC flow for non-conventional layouts: specific application to optical diffusers
| Autor: | Behringer, Uwe, Sungauer, Elodie, Audran, Stephanie, Guillaumet, Simon, Ristoiu, Delia |
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| Zdroj: | Proceedings of SPIE; November 2022, Vol. 12472 Issue: 1 p124720T-124720T-8, 1122489p |
| Databáze: | Supplemental Index |
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