Efficient cross-sectional evaluation method of three-dimensional NAND flash memory by cooperation of coherence scanning interferometry and scanning electron microscopy
| Autor: | Robinson, John C., Sendelbach, Matthew J., Konno, Azusa, Fujimura, Ichiro, Mise, Hiromi, Aiso, Toru, Takeuchi, Syuichi, Koyama, Kazuhiro, Sasajima, Masahiro |
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| Zdroj: | Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p1205317-1205317-11 |
| Databáze: | Supplemental Index |
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