Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM
| Autor: | Robinson, John C., Sendelbach, Matthew J., Neumann, Jens Timo, Srikantha, Abhilash, Hüthwohl, Philipp, Lee, Keumsil, B., James William, Korb, Thomas, Foca, Eugen, Garbowski, Tomasz, Boecker, Daniel, Das, Sayantan, Halder, Sandip |
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| Zdroj: | Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530I-120530I-10, 11932481p |
| Databáze: | Supplemental Index |
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