Resist line edge roughness mitigation at high-NA EUVL
| Autor: | Sanders, Daniel P., Guerrero, Douglas, Ohtomi, Eisuke, Phillipsen, Vicky, Severi, Joren, Welling, Ulrich, Tanaka, Yusuke, De Simone, Danilo |
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| Zdroj: | Proceedings of SPIE; July 2022, Vol. 12055 Issue: 1 p120550K-120550K-8, 1084959p |
| Databáze: | Supplemental Index |
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