OPC optimization and hotspot detection using pattern diffing
| Autor: | Kim, Ryoung-Han, Lafferty, Neal V., Lin, Tsung-Wei, Liu, Chun Yen, Lin, Hung-Yu, Chiang, Mang-Shiun, Sweis, Jason, Hurat, Philippe, Liao, Chun Yen, Wu, Chun-Sheng, Huang, Chao-Yi, Lai, Ya-Chieh |
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| Zdroj: | Proceedings of SPIE; May 2022, Vol. 12052 Issue: 1 p120521E-120521E-7, 1084697p |
| Databáze: | Supplemental Index |
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