Development of a SiON-based integrated platform for the blue/near-UV wavelength range

Autor: Baets, Roel G., O'Brien, Peter, Vivien, Laurent, Bodiou, L., Kamath, P. P., Simon, J.-C., Thual, M., Stervinou, J., Levallois, C., Charrier, J., Trebaol, S.
Zdroj: Proceedings of SPIE; May 2022, Vol. 12148 Issue: 1 p1214807-1214807-8
Databáze: Supplemental Index