Multi-incident holography profilometry for low- and high gradient object

Autor: Schelkens, Peter, Kozacki, Tomasz, Idicula, Moncy S., Mitura, Patryk, Józwik, Michal, Choo, Hyon-Gon, Martínez-Carranza, Juan, Wen, Kai, Kozacki, Tomasz
Zdroj: Proceedings of SPIE; May 2022, Vol. 12138 Issue: 1 p121380L-121380L-9, 1092430p
Databáze: Supplemental Index