Aerosol jetted PZT actuated fiber MEMS scanner for potential microscopic imaging

Autor: Kim, Jaehwan, Song, Kyo D., Oh, Ilkwon, Porfiri, Maurizio, Wang, Wei-Chih, Yen, Colin, Peng, Kuang-Chen, Hsu, Yi-Feng, Wu, Wen-Jong
Zdroj: Proceedings of SPIE; April 2022, Vol. 12045 Issue: 1 p120450C-120450C-9, 1084060p
Databáze: Supplemental Index