Re-orientation of graphoepitaxial fluorite films towards small-index crystallographic planes

Autor: Lukichev, Vladimir F., Rudenko, Konstantin V., Mozhaev, Peter B., Bdikin, Igor K., Bindslev Hansen, Jørn, Jacobsen, Claus S.
Zdroj: Proceedings of SPIE; January 2022, Vol. 12157 Issue: 1 p121571E-121571E-12, 12035542p
Databáze: Supplemental Index