Reliability issues for electrostatically actuated MEMS switch

Autor: Lukichev, Vladimir F., Rudenko, Konstantin V., Uvarov, Ilia V., Izyumov, Mikhail O.
Zdroj: Proceedings of SPIE; January 2022, Vol. 12157 Issue: 1 p121570I-121570I-6, 1094137p
Databáze: Supplemental Index