Reliability issues for electrostatically actuated MEMS switch
Autor: | Lukichev, Vladimir F., Rudenko, Konstantin V., Uvarov, Ilia V., Izyumov, Mikhail O. |
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Zdroj: | Proceedings of SPIE; January 2022, Vol. 12157 Issue: 1 p121570I-121570I-6, 1094137p |
Databáze: | Supplemental Index |
Externí odkaz: |