Development and research of a micromechanical accelerometer sensor element
| Autor: | Lukichev, Vladimir F., Rudenko, Konstantin V., Kalugin, V. V., Kochurina, E. S., Boev, L. R., Anchutin, S. A., Timoshenkov, A. S. |
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| Zdroj: | Proceedings of SPIE; January 2022, Vol. 12157 Issue: 1 p121570G-121570G-7, 1094138p |
| Databáze: | Supplemental Index |
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