Effect of annealing on electrical and optical properties of TiN thin films
| Autor: | Angelsky, Oleg V., Kovaliuk, Taras T., Solovan, Mykhailo M., Mostovyi, Andrii I., Оrletskyi, Ivan G. |
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| Zdroj: | Proceedings of SPIE; December 2021, Vol. 12126 Issue: 1 p121260B-121260B-6, 1091347p |
| Databáze: | Supplemental Index |
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