| Autor: |
Strecker, Adolf, Bäder, Ute, Kelsch, Marion, Salzberger, Ute, Sycha, Maria, Gao, Min, Richter, Gunther, Benthem, Klaus van |
| Zdroj: |
International Journal of Materials Research: Zeitschrift fuer Metallkunde; January 2022, Vol. 94 Issue: 3 p290-297, 8p |
| Abstrakt: |
In transmission electron microscopy (TEM), often the preparation of samples is the most critical part. Specimens have to have disk geometries of 3 mm diameter laterally, and they have to be transparent for the electron beam vertically. Therefore, a specimen thickness in the range of some 1 – 10 nm has to be achieved by the preparation process. While shrinking the specimen dimensions, care has to be taken to recover the materials properties in the nm-regime. We report and shortly discuss some TEM specimen preparation techniques mainly used in the Stuttgart TEM specimen preparation laboratory. Furthermore, we demonstrate how more advanced techniques lead to a more reliable preparation of weakly-bonded metal/SrTiO3interfaces. In addition, the advantage of low-voltage ion-milling is demonstrated by a case study for bulk SrTiO3. As a result, low-voltage ion polishing as a final step in the TEM specimen preparation by conventional ion-thinning turns out to significantly increase the specimen quality. In turn, the interpretation of high-resolution TEM micrographs and electron energy-loss near-edge structures becomes much more straightforward. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
