Fourier optics modelling of coherence scanning interferometers
Autor: | Novak, Erik, Trolinger, James D., Wilcox, Christopher C., de Groot, Peter, Colonna de Lega, Xavier, Su, Rong, Coupland, Jeremy, Leach, Richard |
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Zdroj: | Proceedings of SPIE; August 2021, Vol. 11817 Issue: 1 p118170M-118170M-20, 11698851p |
Databáze: | Supplemental Index |
Externí odkaz: |