Fourier optics modelling of coherence scanning interferometers

Autor: Novak, Erik, Trolinger, James D., Wilcox, Christopher C., de Groot, Peter, Colonna de Lega, Xavier, Su, Rong, Coupland, Jeremy, Leach, Richard
Zdroj: Proceedings of SPIE; August 2021, Vol. 11817 Issue: 1 p118170M-118170M-20, 11698851p
Databáze: Supplemental Index