Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Autor: Taylor, Matthew P., Readey, Dennis W., Teplin, Charles W., Hest, Maikel F. A. M. van, Alleman, Jeff L., Dabney, Matthew S., Gedvilas, Lynn M., Keyes, Brian M., To, Bobby, Parilla, Philip A., Perkins, John D., Ginley, David S.
Zdroj: Macromolecular Rapid Communications; January 2004, Vol. 25 Issue: 1 p344-347, 4p
Abstrakt: Summary: Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω−1 · cm−1 with μ = 25 cm2 · V−1 · s−1, was found at ≈50% In content with a visible transmittance greater than 80%. The (00l) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.
Conductivity as a function of indium content for the three In-Zn-O transparent conducting oxide libraries studied here.
Databáze: Supplemental Index