Metrological characteristics of material measures depending on manufacturing parameters in direct laser writing and external stress factors
| Autor: | Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Gross, Katja, Eifler, Matthias, Hering, Julian, von Freymann, Georg, Seewig, Jörg |
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| Zdroj: | Proceedings of SPIE; June 2021, Vol. 11782 Issue: 1 p117820N-117820N-13, 11664194p |
| Databáze: | Supplemental Index |
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