Towards a continuous frequency band chirp material measure for surface topography measuring instrument calibration

Autor: Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Eifler, Matthias, Hering, Julian, Keksel, Andrej, von Freymann, Georg, Seewig, Jörg
Zdroj: Proceedings of SPIE; June 2021, Vol. 11782 Issue: 1 p117820M-117820M-16, 11664197p
Databáze: Supplemental Index