Towards a continuous frequency band chirp material measure for surface topography measuring instrument calibration
Autor: | Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Eifler, Matthias, Hering, Julian, Keksel, Andrej, von Freymann, Georg, Seewig, Jörg |
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Zdroj: | Proceedings of SPIE; June 2021, Vol. 11782 Issue: 1 p117820M-117820M-16, 11664197p |
Databáze: | Supplemental Index |
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