| Autor: |
King, T T, Kletetschka, G, Jah, M A, Beamesderfer, M A, Li, M J, Wang, L L, Moseley, S H, Sparr, L M, Jhabvala, M D, Kutyrev, A S, Silverberg, R F, Rapchun, D, Zheng, Y, Schwinger, D S, Voellmer, G M |
| Zdroj: |
Journal of Micromechanics and Microengineering; August 2005, Vol. 15 Issue: 8 p1594-1600, 7p |
| Abstrakt: |
Two-dimensional MEMS microshutter arrays (MSA) have been fabricated at the NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST) to enable cryogenic (~35 K) spectrographic astronomy measurements at near-infrared wavelengths. Functioning as a focal plane object selection device, the MSA is a 2D programmable aperture mask with fine resolution, high efficiency and high contrast. The MSA are close-packed silicon nitride shutters (cell size of 100 µm × 200 µm) patterned with a torsion flexure to allow their opening to 90°. A layer of magnetic material is deposited onto each shutter to permit magnetic actuation. Two electrodes are deposited, one onto each shutter and another onto the support structure side-wall, permitting electrostatic latching and 2D addressing. New techniques were developed to test MSA under mission-similar conditions (8 K ? T< 300 K). The 'magnetic rotisserie' has proven to be an excellent tool for rapid characterization of MSA. Tests conducted with the magnetic rotisserie method include accelerated cryogenic lifetesting of unpackaged 128 × 64 MSA and parallel measurement of the magneto-mechanical stiffness of shutters in 'pathfinder' test samples containing multiple MSA designs. Lifetest results indicate a logarithmic failure rate out to ~106shutter actuations. These results have increased our understanding of failure mechanisms and provide a means to predict the overall reliability of MSA devices. |
| Databáze: |
Supplemental Index |
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