Two-Dimensional Control of Shape-Memory-Alloy Actuators for Aligning a Si Micromachined Pinhole of Spatial Filter

Autor: Minoru Sasaki, Minoru Sasaki, Wataru Kamada, Wataru Kamada, Kazuhiro Hane, Kazuhiro Hane
Zdroj: Japanese Journal of Applied Physics; December 1999, Vol. 38 Issue: 12 p7190-7190, 1p
Abstrakt: The automatic alignment of a pinhole is realized in two dimensions and its function as a spatial filter is confirmed. A pinhole device surrounded by four photodiode cells fabricated by Si micromachining techniques is placed on a movable xystage which consists of four shape-memory-alloy actuators. The feedback control based on the signal obtained from the integrated photodiode is confirmed to be feasible for aligning a pinhole in two dimensions even if the shape-memory-alloy actuators are disadvantageous for controlling its displacement including cross-interaction. The spatial filtering function of an automatically aligned pinhole is confirmed.
Databáze: Supplemental Index