| Autor: |
Shinya Kumagai, Shinya Kumagai, Minoru Sasaki, Minoru Sasaki, Mitsumasa Koyanagi, Mitsumasa Koyanagi, Kazuhiro Hane, Kazuhiro Hane |
| Zdroj: |
Japanese Journal of Applied Physics; December 1999, Vol. 38 Issue: 12 p7126-7126, 1p |
| Abstrakt: |
Metastable chlorine ions (Cl+*) were detected in time-modulated inductively coupled plasma by a time-resolved laser-induced fluorescence technique. By varying the rf power, gas pressure and modulation frequency, the Cl+*density was measured in detail. In the discharge-on period, the Cl+*density increased as the rf power increased. In the discharge-off period, the rf power decreased within 1 µs, however, the Cl+*density decreased more slowly and persisted for a while. The decay constant was evaluated to be around 10 µs by fitting the decay curve under our experimental conditions. In addition, the diffusion coefficient of Cl+*was also estimated. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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