| Autor: |
Surbled, Patrick, Clerc, Catherine, Pioufle, Bruno Le, Fujita, Hiroyuki |
| Zdroj: |
Japanese Journal of Applied Physics; December 1999, Vol. 38 Issue: 12 pL1547-L1547, 1p |
| Abstrakt: |
The sputtering of TiNi polycrystalline alloys without and with a titanium mesh has been investigated for the development of shape memory alloy (SMA) micro-actuators. The thickness and composition distributions of TiNi thin films have been determined by Rutherford backscattering spectroscopy (RBS). The composition of sputtered films was demonstrated to depend on the density of the titanium mesh and the distance from the target center, thus enabling easy fabrication of high and low temperature SMA actuators. The transition temperatures and resistivity have been measured with respect to the composition. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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