Role of Indium on Nitrogen Incorporation in GaNAs Grown by Metalorganic Molecular-Beam Epitaxy

Autor: Nobuki Morooka, Nobuki Morooka, Katsuhiro Uesugi, Katsuhiro Uesugi, Ikuo Suemune, Ikuo Suemune
Zdroj: Japanese Journal of Applied Physics; November 1999, Vol. 38 Issue: 11 pL1309-L1309, 1p
Abstrakt: The role of indium on the growth surfaces of GaNAs was studied with metalorganic molecular-beam epitaxy. GaNAs was grown with and without triethylindium (TEIn) supply. High-resolution X-ray diffraction measurements reveal an increase in nitrogen incorporation in GaNAs with TEIn supply and negligible indium incorporation. This indicates that indium plays the role of a surfactant on the growth surface and enhances nitrogen incorporation in GaNAs.
Databáze: Supplemental Index