| Autor: |
Teii, Haruhiko Ito, Masayuki Ishikawa, Masayuki Ishikawa, Masafumi Ito, Masafumi Ito, Masaru Hori, Masaru Hori, Takashi Takeo, Takashi Takeo, Terumasa Kato, Terumasa Kato, Toshio Goto, Toshio Goto |
| Zdroj: |
Japanese Journal of Applied Physics; July 1999, Vol. 38 Issue: 7 p4504-4504, 1p |
| Abstrakt: |
Diamond was successfully synthesized by using H2-rich CH4/CO/H2and H2-rich CH4/H2inductively coupled plasmas at a pressure of 11 Pa. The ratio of particle size to deposition time, as a criterion of the diamond growth rate, in H2-rich CH4/CO/H2mixture gas plasmas was higher than that in H2-rich CH4/H2mixture gas plasmas. The deposits in H2-rich CH4/H2and H2-rich CH4/CO/H2mixture gas plasmas were found to contain nondiamond phases, as confirmed by Raman spectroscopy. In order to investigate the mechanism involved in diamond formation, C-atom densities in the plasmas were measured by vacuum ultraviolet absorption spectroscopy with a carbon hollow cathode lamp. In addition, CH, OH and H-atom emission intensities were measured by optical emission spectroscopy. As a result, it was found that the C-atom densities increased considerably with increasing mixture ratio of CO to CH4. On the basis of the correlation between the quality of deposits and the C-atom densities, C-atoms were determined to probably contribute to the formation of nondiamond phases in the deposits. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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