| Autor: |
Koichi Sasaki, Koichi Sasaki, Kenichiro Usui, Kenichiro Usui, Hiroyuki Furukawa, Hiroyuki Furukawa, Chihiro Suzuki, Chihiro Suzuki, Kiyoshi Kadota, Kiyoshi Kadota |
| Zdroj: |
Japanese Journal of Applied Physics; September 1998, Vol. 37 Issue: 9 p5047-5047, 1p |
| Abstrakt: |
Decay time constants of CFxradical and H atom densities were measured in the afterglow of high-density CF4plasmas following the addition of H2. The lifetimes of CFxand H for high H2partial percentages (>25%) were several tens of times longer than those for low H2partial percentages (<15%). The long lifetimes of both CFxand H observed for high H2percentages suggest that the rate coefficient for the gas-phase reaction CFx+ H ?CFx-1+ HF is much smaller than the values reported in literature. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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