| Autor: |
Nishikawa, Hideshi, Tanaka, Tadami, Yanase, Yoshio, Hourai, Masataka, Masakazu Sano, Masakazu Sano, Hideki Tsuya, Hideki Tsuya |
| Zdroj: |
Japanese Journal of Applied Physics; November 1997, Vol. 36 Issue: 11 p6595-6595, 1p |
| Abstrakt: |
The formation behavior of grown-in defects in Czochralski silicon (CZ-Si) crystals was investigated using two crystals that were quenched during growth but in one case after crystal growth had been halted for 5 h. The distributions of grown-in defect density and size, and their micro-structures were analyzed as a function of temperature during crystal growth just before quenching by means of an optical precipitate profiler (OPP) and an atomic force microscope (AFM) coupled with a laser particle counter. The formation of grown-in defects, which are considered to be octahedral voids, was found to consist of two dominant processes. The first step involves rapid void growth in a narrow temperature range of about 30° C below 1100° C and the subsequent step consists of an oxide film growth on the inner surface of the void during the cooling process to about 900° C after void formation. It was also found that the growth of the oxide film in the voids is rate-limited by the diffusion rate of oxygen atoms in silicon. In addition, it is strongly suggested that void formation in such a narrow temperature range is due to a rapid agglomeration of vacancies. |
| Databáze: |
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