| Autor: |
Soichiro Okamura, Soichiro Okamura, Yukie Yagi, Yukie Yagi, Atsushi Kakimi, Atsushi Kakimi, Shizutoshi Ando, Shizutoshi Ando, Katsumi Mori, Katsumi Mori, Takeyo Tsukamoto, Takeyo Tsukamoto |
| Zdroj: |
Japanese Journal of Applied Physics; September 1996, Vol. 35 Issue: 9 p5224-5224, 1p |
| Abstrakt: |
Crystallization of precursor micropatterns of ferroelectric Bi4Ti3O12fabricated by electron beam scanning was investigated in comparison with that of thin films. Precursor solutions were prepared by mixing bismuth and titanium octylates with various Bi : Ti molar ratios. Single-phase Bi4Ti3O12thin films were formed by spin-coating a solution containing Bi and Ti atoms at a molar ratio of 5.2 : 3.0 and successive heat treatment. It was possible to control orientation of the Bi4Ti3O12thin films by changing the sintering temperature. Bi4Ti3O12thin films consisting of platelike crystals with predominantly c-axis orientation were obtained by sintering at 800°C. Precursor micropatterns were fabricated by scanning an electron beam on metal octylate films and development with toluene. They were crystallized into single-phase Bi4Ti3O12by sintering at 800°C. However, the Bi4Ti3O12micropatterns consisted of small grains, unlike the large platelike crystals in thin films. There was a clear difference in crystallization between the thin films and the micropatterns. |
| Databáze: |
Supplemental Index |
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