| Autor: |
Ohtsu, Yasunori, Takuma Seki, Takuma Seki, Hiroharu Fujita, Hiroharu Fujita |
| Zdroj: |
Japanese Journal of Applied Physics; August 1996, Vol. 35 Issue: 8 p4494-4494, 1p |
| Abstrakt: |
Temporal behavior of charged particles in pure He and He-SF6radio frequency (rf) afterglow plasmas has been experimentally clarified for various SF6gas concentrations (1, 25, 50%). The electron density in the pure He plasma increased just after the rf power was switched off, unlike in a pure Ar plasma, and then decreased slowly. The increase was probably due to collisional ionization of metastable He atoms. The electron density in the He-SF6plasmas decreased exponentially. This was due to electron attachment to various molecules in the afterglow plasma. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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