Effects of O2Gas Pressure in Heat Treatment on Surface Morphology and Electric Properties of Ferroelectric Bi4Ti3O12Thin Films with c-Axis Orientation

Autor: Kakimi, Atsushi, Okamura, Soichiro, Ando, Shizutoshi, Takeyo Tsukamoto, Takeyo Tsukamoto
Zdroj: Japanese Journal of Applied Physics; September 1995, Vol. 34 Issue: 9 p5193-5193, 1p
Abstrakt: Fabrication of ferroelectric Bi4Ti3O12thin films was carried out by spin-coating pyrolysis of Bi and Ti naphthenates and successive heat treatment in O2gas at various pressures. Heat treatment in O2gas at high pressure was effective for the fabrication of c-axis oriented Bi4Ti3O12thin films with a smooth surface and improvement of their electric properties. The thin film heat-treated at the O2gas pressure of 4.0×105Pa was a single phase of Bi4Ti3O12completely oriented along the c-axis with good ferroelectric properties at room temperature: coercive field of 23 kV/cm, remanent polarization of 1.9 µ C/cm2, dielectric constant of 45, loss of 0.01 and leakage current density on the order of 10-9A/cm2. The remanent polarization of the thin film was kept constant up to the polarization reversal at 1×107cycles.
Databáze: Supplemental Index